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200mm outlet size slurry pump and parts

200mm outlet size slurry pump and parts

a point of use peristaltic pump system tested on a 200mm Novellus Momentum™ CMP oxide tool and a 200mm Applied Materials MirraMesa™ copper CMP tool. The BPS pump tested on the oxide slurry distribution system showed a 28 percent reduction in particles at 800nm and better than 50% reduction in particles greater than 1 micron.

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